Energy Analyzer for XPS, ESCA, UPS, SAM, AES, ISS

**The New Energy Analyzer EA 120 MCD**

The EA 120 MCD is designed for use in an ESCA system to perform XPS, SSXPS (Small Spot XPS), UPS, AES, SAM and ISS measurements. These Electron/Ion Spectroscopy techniques, in particular XPS and Small Spot XPS, offer the possibility to obtain quantitative elemental and chemical information from surface layers, providing a powerful analysis tool for a wide range of materials.

**Performance Data EA 120 MCD**
Method	Excitation	Line	Signal (cps)	Note
XPS dE=const.	Mg 300 W 15 keV	Ag 3d 5/2	2.500.000	FWHM 1.0 eV
Small Spot XPS dE=const.	Mg 300 W 15 keV	Ag 3d 5/2	20.000	FWHM 1.40 eV and 1000 µm accep. area
MXPS dE=const.	monochromatized Al Kalpha 300 W,15 keV	Ag 3d 5/2	40.000	FWHM 0.65 eV
ISS dE/E=3	He+, 2 keV, 1 µA biased +90V	Ag elastic peak	1.000.000	differentially pumped fine focus Ion Source
UPS > dE/E=3	He I He II	Au 5d band	1.000.000 250.000	Gas Discharge UV Lamp

The EA 120 MCD is a Multi-Channel Detector (MCD) version using a five-channeltron array to record energy spectra for negative charged particles (electrons) and positive charged particles (ions). 6 different entrance slits (selectable, indexed) allow the choice of various spot sizes and solid angles of acceptance. The analyzer uitilizez a Fringe Field Correction for Ultimate Energy Resolution.

Specifications EA 120 MCD:

Hemispherical Electrostatic Capacitor
Mu-metal shielding is built into the UHV housing for the analyzer and input lens system
Input lens system includes a first lens stage (non retarding = constant analysis area for all kinetic energies) with variable angular aperture and image aperture and a second lens stage (retarding)
Mean radius	120 mm
Angle of spheres	180°
Spatial resolution	1000 µm for Small Spot XPS
Acceptance area	variable 1000 µm to 5 x 10mm
Acceptance angle	variable 4 to 12 degree
Flange to sample distance	196 mm (others optional)
Working distance	40 mm
Bakeable up to	250 °C
Mounting flange	NW 100 CF

The analyzer is controlled by the SPECTRA Data Acquisition and Processing System:

SPECTRA Software Package for XPS, UPS, AES, ISS etc.
Auger and ESCA- database, spectral acquisition, element identification, depth profiling, integration, differentiation, smooth, curve fitting, background subtraction etc.
Software runs under Windows XP, NT, and Vista
Interface card PCI 725 and SPECTRA MCD-Channel Data Acquisition Board and Multi-Channel Data Acquisition Software for Full Remote Control of the Power Supplies of the EA 120
Additional WINDOWS-based programme Presents only for data processing.
Imaging- and SIMS capabilities available on request

Please download your EA 120 MCD Energy Analyzer Brochure

The EA 120 MCD is designed for use in OmniVac SPECS ESCA Systems:

Please download your XPS Systems Brochure

SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com