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New UHV
Wavelength Dispersive Spectrometer from Parallax Research
- WDS in True UHV Design with All Metal Seals
- Based on the Proven HEXS Spectrometer Concept
- Applications:
Wavelength Dispersive Spectroscopy, Energy Dispersive Spectroscopy, X-ray
Fluorescence (XRF) Spectroscopy, X-ray, EUV or XUV Lithography, Plasma
Diagnostics, X-Ray Microscopy, Synchrotron X-Ray Optics, Micro-XPS or
ESCA, Diffractometry
- Retractable X-Ray Collimating Optic, Hexagonal Diffractor Turret, Sealed Proportional Counter, X-Ray Concentrating Optics with Small Detector Window
- UHV Gate Valve and Pumping System for Achieving UHV Levels. This system IS NOT DIFFERENTIALLY PUMPED
- HEXS Data Acquisition and Processing Software