Scientific

New Pulsed Laser Deposition - PLD Vacuum Systems - Laser MBE

Excimer Based System for UHV Deposition from Various Targets, Automatic Target Scanning, Sample Preparation and Transfer System

PLD Features:

• Excimer Based Pulsed Laser System for UHV Deposition from Various Targets
• Automatic Target Scanning, Sample Preparation and Transfer System
• High Oxygen Resistance Substrate Heaters and Components
• Excellent Thin Film Uniformity and Temperature Homogenity
• Laser Beam Line, including Optical Train with Mirror and Focussing Lens
  
• Complete UHV Systems with In-Situ Diagnostics, RHEED, Ellipsometry, Pyrometry
• Compact Modular Design, Easy Operation, Multi Function Use
  
• Manual or Automated Operation, Fully Computer Controlled System
  

PLD-Systems Beamline	UHV-PLD System with Sample Distribution Chamber

 

PLD Specifications:

1. Sample Introduction System with Quick Access Door (Viewport), Sample Parking Station, Magnetically Coupled Sample Transfer

2. PLD-chamber (stainless steel) with a flanges for laser ports, target flanges, substrate flanges, window, spare

- Substrate flange with: up to 8"sample holder, Sample Heating (950 degC), Oxygen Compatible, Manual/Electric/Pneumatic Shutter System, Thermocouple, Motorized Substrate Rotation, Power Supplies for Heating Sample Rotation and Incl. Temperature Control

- Target flange for up to 8 Targets, Automated Target Rotation, Heat Shield

3. Sample Transfer Mechanism to Optional Analytical Chamber

4. Analytical Chamber with Manipulator for Heating and Cooling, Polar Rotation

5. Substrate Holder for up to 8" Samples, Oxygen Compatible

6. Gate Valves (Pneutamtically Operated), Interlocked to close on Vacuum Failure

7. Pumping System: Oilfree Mechanical Pump, Cryopump, Turbopump, Ion Pump, TSP-Pump, Vacuum Gauging

8. Pulsed Excimer Laser, Complete with Beam Line, including Optical Train with Mirror and Focussing Lens

9. In-Situ Diagnostics: Pyrometire, Ellipsometry, High-Pressure RHEED, Surface Analysis Techniques

10. Rigid Frame (movable, adjustable), Bakeout Facilities, Bakeout Timer, Gas Cabinet, Ecltircal Racks and Power Distribution

11. Computer Control System, Operation Control Software for Target Scanning, Target Selection, Growth Monitoring, Deposition Rate Control

LASER MBE System	UHV-PLD System with Sample Distribution Chamber

 

PLD Components - Sub Assemblies:

1000°C PLD Substrate Manipulator	UHV-PLD Target Manipulator for 3 Targets