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New NanoDeposition
Science, NanoParticle Generators, RF Sources, E-Beam Evaporators from Mantis
Deposition
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NanoDeposition
Science Instruments
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RF-Source
with AutoTuning
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NanoParticle-NanoCluster Generators |
UHV Deposition System for NanoStructureDeposition
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NanoDeposition UHV Research Systems, for Thermal, Sputter and NanoCluster Deposition Processes with In-Situ Growth Monitoring, RHEED, Surface Analysis, Ellipsometry
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Fully Automated System Operation and Process Control
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RF Plasma Atom- and Ion-Sources with Auto-Tuning, up to 1000 Watt Power for 10"CF Atom Production Sources
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NanoCluster Generator with High-Resolution Mass Filter
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E-Beam UHV-Evaporators with Single or Multi-Pocket Capabilities for Sequential and Synchronous Operation
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Thermal Gas Crackers for Generation of Atmic Fluxes of Reactive Species: Atomic Oxygen , Atomic Chlorine etc.
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UHV Magnetron Sputter Sources up to 8" CF Mounting
