-
Compact
Design, Easy Operation, Multi Function Use
-
III-V
and II-VI materials, SiGe, GaN, GaAs, Nitrides, Oxides and Organic Applications
-
8-10
UHV Ports for Effusion Cells, E-Beam Evaporators, Gas Sources
-
Heatable/Rotatable
Substrate Manipulator
-
3"
Substrate Handling System
-
Research
or Automated Mode
-
RHEED,
VIDEO-RHEED
-
Beam
Flux Monitor, RGA
-
Future
Upgrades and Ad-On's
