• Diameter: 250 mm

• 4 stage sample manipulator

• Substrate heater, Tmax. = 1100 °C (oxygen desorption)

• Pumping equipment: ion pump + Ti sublimation pump

Growth chamber:

• Diameter: 450 mm, LN2 cryopanel

• X,Y,Z sample manipulator, motorized rotation - substrate heater, Tmax. = 1300 °C

• Pumping equipment : ion pump, Ti sublimation pump, cryopump and magnetic bearing turbo molecular pump

• Sources : 8 effusion cells (models SFC, HTC. DFC, LTC-V) 2 nitrogen sources

• Analysis equipment RHEED system (50 kV) pyrometer (1 heatable window HW-63/40-W) ellipsometer (2 heatable windows HW-35/20-W) mass spectrometer beam flux monitor (model BAF) quartz oscillator sensor

News | Home | Products | Site Map | Contact Info | E-Mail Us