|
Typical manipulator for an MBE system, parking chamber of containing four parking positions for 2 inch substrate holders. One of the position is heatable to 1100 °C (optional 1300 °C). This manipulator can be designed to fit into any customers chamber. |
|
|
Technical Data: |
|
|
|
|
|
Standard: |
|
|
Type |
MSHT - 412 |
|
Sample holder |
2 inch (or as specified) |
|
Storage capacity |
Four places |
|
Heating system |
Radiation heating, tantalum or tungsten wire, self-supported |
|
Temperature range |
1100 °C (Ta- Filament
) |
|
Motion |
X, Y ±12,5 mm, |
|
Rotation |
PHI1 = ±175° (max.) PHI2 = continuous |
|
Conditioning |
Heated to maximum |
|
Shipping |
Stainless steel container with valve |
|
|
|
|
Options: |
|
|
Other dimensions |
As specified |
News | Home | Products | Site Map | Contact Info | E-Mail Us
(PDF)