Heating Lamp for
UHV applications, wafer heating and annealing
Specifications:
- Wafer size: 2",
larger sizes available
- 7 Quartz Heaters with
150 Watt each
- Integrated Water Cooling
Jacket
- Quartz Lamps easily
replaceable
- Thermocouple: Type K
- Power Supply and Controller
Applications:
- Heating of Wafer in
Load Lock or Sample Treatment Chamber
- Heating in atmosphere
(O, N, NO etc) from UHV to 1000 mbar
SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com
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