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UHV Custom Built Vacuum Chambers, Mu-metal Recipients, Liners, UHV Systems and Assemblies |
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Crucibles for all common MBE systems and effusion cells in a variety of sizes and materials: PBN, BeO, Alumina, VC, Ta, W, Mo etc. |
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| The beam flux monitor BAF is used for the precise measurement of beam equivalent pressures of different molecular beams in an MBE system. | |
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Custom designed manipulators for MBE systems, up to 8" substrate size and heatable up to 2000 degC. |
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Indium-free sample holders with easy-mount sample exchange system for any MBE system. |
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| Linear
and rotary shutters for effusion cells. Shutters for substrates, to protect windows and RHEED screens. |
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| Enhanced Multi-Environment Real Time Control EMERALT for MBE and CVD Systems | |
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For optimized operation of effusions cells, gas sources, heating stages of the manipulators Very stable, both DC and AC output are available. |
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Water Cooling Jacketsm Cluster Flange Assemblies and Cryoshrouds for Effusion Cells and Chamber Wall Cooling.
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| Heating Lamp for UHV applications, wafer heating and annealing | |
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Heatable
window with outstanding performance, window temperatures up to 1000
°C |
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A variety of motion feedthroughs as manually, pneumatically or electrically driven shutter drives. |
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