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Dual Filament Cell, Hot-Lip Effusion Cell

DFC

Dual Filament Cell

This effusion cell is specially designed for the evaporation of gallium, indium, copper etc. Special measures are taken to prevent material condensation at the crucible orifice. An additional heating system with a separate thermocouple is installed at the top end of the crucible. Using two control circuits, this allows the adjustment of the orifice temperature (HOT-LIP Design) independenly of the bulk material temperature.

OPTIONS:

Technical Data:

Standard:

 

Type

DFC

Heating System

Radiation heating, tantalum wires with PBN insulators

Temperature range

200 °C ...1400 °C bulk zone
200 °C ...1400 °C hot-lip

Temperature stability

>=0.2 K depending on the PID controller

Max. outgas temp.

1600 °C bulk zone
1600 °C hot-lip

Max. power

360 W bulk zone
120 W hot-lip

Max. current

12 A bulk zone
6 A hot-lip

Bakeout temperature

250 °C

Conditioning

Heated to maximum temperature with and without crucible

Shipping

Stainless steel container with valve

 

 

Custom:

 

Flange size

CF 40 / CF 63

Max outer diameter

38 mm

Length

As specified

Thermocouple type

Two independent TC's
Type C / WRe 5%-26% (or specified)

Crucible material

PBN / PGR / W / Ta

Crucible capacity

5 - 39 ccm

 

Options:

 

Integrated shutter

Optional

Water cooling

Optional

Other dimensions

As specified

Crucible with insert

Optional

Downward looking

Optional


Download your Dual Filament Cell, Hot-Lip Effusion Cell Datasheet(PDF)




SPECS Technologies Corporation
3318 Plantation Dr.
Sarasota, Florida 34231
Phone: (941) 362-4877
Fax: (941) 364-9706
support@specs.com

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