The cold lip effusion cell is designed to evaporate materials like Al that tend to overflow due to the wetting of the PBN surface. The cold orifice results a long life- time of the cell and low defect concentrations in the epitaxial layer.
OPTIONS
| Standard: | |
| Type | CLC |
| Heating System | Radiation heating, tantalum wires with PBN insulators |
| Temperature range | 200 °C ...1400 °C |
| Temperature stability | <=0.1 K depending on the PID controller |
| Max. outgas temp. | 1600 °C |
| Max. power | 220 W |
| Max. current | 8 A |
| Bakeout temperature | 250 °C |
| Conditioning | Heated to maximum temperature with and without crucible |
| Shipping | Stainless steel container with valve |
| Custom: | |
| Flange size | CF 40 / CF 63 |
| Max outer diameter | 38 mm |
| Length | As specified |
| Thermocouple type | Type C / WRe 5%-26% (or specified) |
| Crucible material | PBN / PGR / W / Ta / Mo / quartz |
| Crucible capacity | 5 - 39 ccm |
| Options: | |
| Integrated shutter | Optional |
| Water cooling | Optional |
| Other dimensions | As specified |
| Crucible with insert | Optional |
| Downward looking | Optional |
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