Carbon Effusion Cell
EBC
The CreaTec carbon effusion cell EBC is used for carbon doping in MBE. A pyrolytic graphite rod is heated by electron bombardment to a maximum temperature of 2000 °C to evaporate elemental high purity carbon. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.
Technical Data:
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Standard: |
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Type |
EBC |
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Heating System |
Electron beam bombardment |
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Temperature range |
200 °C ... 2200 °C |
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Current stability |
10^-5 of the maximum emission current |
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Max. outgas temp. |
2300 °C |
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Max. power |
750 W |
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Max. current |
1 A |
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Bakeout temperature |
250 °C |
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Conditioning |
Heated to maximum temperature |
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Shipping |
Stainless steel container with valve |
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Custom: |
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Flange size |
CF 40 / CF 63, as specified |
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Max outer diameter |
38 mm / 63 mm / 100 mm, as specified |
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Length |
As specified |
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Thermocouple type |
Type C / WRe 5%-26% |
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Options: |
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Integrated shutter |
Optional |
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Water cooling |
Optional |
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Other dimensions |
As specified |
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The carbon flux is shown for heating powers between 120 W and 735 W. It can be varied over three orders of magnitude. |
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(PDF)