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High Resolution X-ray Diffraction and X-ray Reflectivity Systems
Bede Scientific is the global leader in non-destructive X-ray metrology systems. Bede Systems deliver dramatic yield enhancement through the absolute measurement of Semiconductors, OLEDs, LEDs, Thin-Films, Laser Coatings, Photovoltaics and pure single crystals. These measurements include not only thickness, but also structure, roughness and composition as listed below.
Features
- Automated source/detector configuration change – precise, motorized optics – no manual intervention – productivity +
- Recipe-driven REMOTE operation from work or home – a Fab proven tool – 7/24/365
- Overnight automated runs by recipes, scripts and libraries – frees engineer – enables true multi-tasking
- Channel Cut Crystals (CCC) designs that optimize X-ray intensities, Ge(004) and Si (022)
- Vertical diffraction geometry maximizes precision and angular resolution – eliminates noise
- Patented Genetic Fitting Algorithm – robust and highly accurate – true money saver
- Microsource™ – the brightest source
- ScribeView™ – the smallest beam
High-Resolution X-ray Diffraction (HR-XRD)
X-ray Reflectivity (XRR)
X-ray Fluorescence (XRF)
X-ray Diffraction Imaging (XRDI)
X-ray Diffraction (XRD)
HR-XRD & XRR are used to Measure:
%
Crystallinity (% amorphous) % Relaxation of strain in
Epilayer
Area
uniformity
Average grain/crystallite size
Bulk
phase identification
Buried edge damage
Composition of Epilayer
Curvature (Bow)
Density of layer
Depth
Profile
Dislocation
Distinguish strain from tilt
Distinguish roughness from grading
Film
quality In-Plane vs Out-of-Plane
Interface roughness
Lattice
tilt Miscut
Mismatch
Strain
Structural
defects
Onset of crystallization
Onset of relaxation
Overlayer thickness
Periodicity of superlattice
Phase identification
Pole figure
Pore size
Porosity
Preferred orientation of crystal
Residual stress
Strain in Epilayer
Strain
Structural
defects
Structural dislocations
Structural misfits in epitaxy
Structural orientation
Texture analysis
Thermal slips
Thickness of layer
Thickness of Epilayer
Thin film phase identification
Tilt/Twist mosaicity
